Stage apparatus with two patterning devices, lithographic apparatus and device manufacturing method skipping an exposure field pitch

ABSTRACT

In order to improve the productivity of a lithographic apparatus, a stage apparatus for holding two patterning devices is described. The patterning devices are arranged such that the distance between the patterns in the scanning direction corresponds to the length of the pattern in the scanning direction. By doing so, an improved exposure sequence may be performed by exposing a first die with a first pattern, skipping a second die adjacent to the first die, and exposing a third die adjacent to the second die using a second pattern.

RELATED APPLICATIONS

The present application is a continuation-in-part of U.S. applicationSer. No. 11/179,780 filed Jul. 13, 2005, the entire contents of which ishereby incorporated by reference.

FIELD

The present invention relates to a stage apparatus, a lithographicapparatus, a masking device and a method for manufacturing a device.

BACKGROUND

A lithographic apparatus is a machine that applies a desired patternonto a substrate, usually onto a target portion of the substrate. Alithographic apparatus can be used, for example, in the manufacture ofintegrated circuits (ICs). In that instance, a patterning device, whichis alternatively referred to as a mask or a reticle, may be used togenerate a circuit pattern to be formed on an individual layer of theIC. This pattern can be transferred onto a target portion (e.g.,comprising part of one, or several dies) on a substrate (e.g., a siliconwafer). Transfer of the pattern is typically via imaging onto a layer ofradiation-sensitive material (resist) provided on the substrate. Ingeneral, a single substrate will contain a network of adjacent targetportions that are successively patterned. Known lithographic apparatusinclude so-called steppers, in which each target portion is irradiatedby exposing an entire pattern onto the target portion at one time, andso-called scanners, in which each target portion is irradiated byscanning the pattern through a radiation beam in a given direction (the“scanning”-direction) while synchronously scanning the substrateparallel or anti-parallel to this direction.

In order to obtain the appropriate image on the substrate, it may bedesirable to expose the target portion on the substrate twice or more.Such multiple exposures can be done using a different pattern for eachexposure or using a different optical setting in the projection systemor the illumination system of the lithographic apparatus or both. Incase a different pattern is used for the different exposures, thesedifferent patterns can, e.g., be provided by different patterningdevices. As an example, it may be desirable for a substrate to have bothan exposure using a phase shift mask and an exposure with a trim mask.It may be desirable that both exposures have different exposureconditions. Conventionally, such a ‘double exposure’ is obtained byfirst exposing the entire substrate with a first patterning device(e.g., a phase shift mask), then exchanging the first patterning devicewith a second patterning device (e.g., a trim mask) and finally exposingthe entire substrate with the second patterning device. This procedureis rather time consuming and generally result in an inferior performancewith respect to throughput (i.e., number of substrates that is processedper unit of time). The drawback of changing the patterning devices canbe mitigated by using multiple patterning devices on one stage, asdescribed in U.S. Pat. No. 6,800,408. Despite the use of multiplepatterning devices on one stage, the exposure method presented may stillhave a significant impact on the throughput of the apparatus.

SUMMARY

According to an embodiment of the invention, there is provided a stageapparatus for a lithographic apparatus provided with a projection systemfor projecting a pattern onto a substrate, wherein the stage apparatusis constructed and arranged for performing a scanning operation of afirst and second patterning device with respect to the projectionsystem, whereby during the scanning operation a pattern of the firstpatterning device and a pattern of the second patterning device areprojected on the substrate wherein the stage apparatus is constructedand arranged to position the patterning devices during the scanningoperation such that a distance between the patterns substantially equalsa predetermined function of the reduction factor of the projectionsystem and a non-zero number of exposure field pitches of a fieldpattern of the substrate, allowing an exposure of a first exposure fieldwith the first patterning device and a second exposure field with thesecond patterning device, the second exposure field being spaced apartfrom the first exposure field by the non-zero number of exposure fieldpitches.

According to a further embodiment of the invention there is provided alithographic apparatus including an illumination system configured tocondition a radiation beam; a stage apparatus constructed and arrangedfor performing a scanning operation of a first and second patterningdevice each provided with a pattern, the patterning devices beingcapable of imparting the radiation beam with the patterns to form apatterned radiation beam; a substrate table constructed to hold asubstrate; and a projection system configured to project the patternedradiation beam onto a target portion of the substrate, whereby duringthe scanning operation the pattern of the first patterning device andthe pattern of the second patterning device are projected on thesubstrate and wherein the stage apparatus is constructed and arranged toposition the patterning devices during the scanning operation such thata distance between the patterns substantially equals a predeterminedfunction of the reduction factor of the projection system and a non-zeronumber of exposure field pitches of a field pattern of the substrate,allowing an exposure of a first exposure field with the first patterningdevice and a second exposure field with the second patterning device,the second exposure field being substantially spaced apart from thefirst exposure field by the non-zero number of exposure field pitches.

According to another embodiment of the invention, there is provided amasking device for use in a lithographic apparatus according to thepresent invention, the masking device including a first masking partfor, in use, obscuring a first part of the first patterning devicebefore the pattern of the first patterning device is imparted by theradiation beam, a second masking part for, in use, obscuring a secondpart of the first patterning device after the pattern of the firstpatterning device is imparted by the radiation beam and for obscuring afirst part of the second patterning device before the pattern of thesecond patterning device is imparted by the radiation beam and a thirdmasking part for, in use, obscuring a second part of the secondpatterning device after the pattern of the second patterning device isimparted by the radiation beam.

According to an other embodiment of the present invention, there isprovided a method of exposing a substrate using a lithographic apparatusprovided with a projection system, the method including arranging twopatterning devices each including a pattern on a stage apparatus suchthat the patterns of both devices are arranged adjacent to each other ina scanning direction with a distance between the patterns substantiallyequal to a predetermined function of a reduction factor of theprojection system and a non-zero number of exposure field pitches of afield pattern of the substrate; providing the substrate on a substratestage; accelerating both the patterning devices and the substrate to apredetermined speed relative to the projection system; projecting apattern of the first patterning device onto a first field of thesubstrate while substantially maintaining the speed; displacing both thepatterning devices and the substrate stage substantially at thepredetermined speed thereby skipping the non-zero number of exposurefield pitches on the substrate arranged adjacent to the first field inthe scanning direction; projecting a pattern of the second patterningdevice onto a further field of the substrate arranged adjacent to thenon-zero number of exposure field pitches on the substrate in thescanning direction.

In yet another embodiment of the invention, there is provided a stageapparatus for a lithographic apparatus that includes a projection systemconfigured to project a pattern on a substrate, the stage apparatusincluding a first object table configured to hold a first patterningdevice; a second object table configured to hold a second patterningdevice, each of the first and second patterning devices including apattern, and the first and second patterning devices being arranged suchthat the pattern of the first patterning device and the pattern of thesecond patterning device are adjacent to each other in a scanningdirection; a positioning device configured to position the first andsecond patterning devices and the substrate, and a control deviceconfigured to control the positioning device, the control deviceconstructed and arranged to provide the positioning device with aset-point adapted to: (i) accelerate the first patterning device to afirst predetermined speed relative to the projection system of thelithographic apparatus, (ii) accelerate the substrate to a predeterminedscanning speed relative to the projection system so as to project thepattern of the first patterning device onto a first field of thesubstrate while substantially maintaining the scanning speed; (iii)displace the substrate substantially at the predetermined scanning speedso as to skip an exposure of a non-zero number of exposure field pitchon the substrate arranged adjacent to the first field in the scanningdirection; and (iv) accelerate the second patterning device to the firstpredetermined speed relative to the projection system so as to exposethe second pattern onto a second field of the substrate arrangedadjacent to the non-zero number of exposure field pitch on the substratein the scanning direction.

In another embodiment of the invention, there is provided a lithographicapparatus including (a) an illumination system configured to condition aradiation beam; (b) a substrate table constructed to hold a substrate;(c) a stage apparatus including (i) a first object table configured tohold a first patterning device; (ii) a second object table configured tohold a second patterning device, each of the first and second patterningdevices including a pattern to pattern the radiation beam, and the firstand second patterning devices being arranged such that the pattern ofthe first patterning device and the pattern of the second patterningdevice are adjacent to each other in a scanning direction; (iii) apositioning device configured to position the first and secondpatterning devices and the substrate, and (iv) a control deviceconfigured to control the positioning device; and (d) a projectionsystem configured to project the patterned radiation beam onto a targetportion of the substrate such that during a scanning operation thepattern of the first patterning device and the pattern of the secondpatterning device are projected on the substrate, wherein the controldevice is constructed and arranged to provide the positioning devicewith a set-point adapted to: (1) accelerate the first patterning deviceto a first predetermined speed relative to the projection system of thelithographic apparatus, (2) accelerate the substrate to a predeterminedscanning speed relative to the projection system so as to project thepattern of the first patterning device onto a first field of thesubstrate while substantially maintaining the scanning speed; (3)displace the substrate substantially at the predetermined scanning speedso as to skip an exposure of a non-zero number of exposure field pitchon the substrate arranged adjacent to the first field in the scanningdirection; and (4) accelerate the second patterning device to the firstpredetermined speed relative to the projection system so as to exposethe second pattern onto a second field of the substrate arrangedadjacent to the non-zero number of exposure field pitch on the substratein the scanning direction.

In an embodiment of the invention, there is provided a method ofexposing a substrate using a lithographic apparatus including aprojection system, the method including: arranging on a stage apparatusa first and a second patterning device that each include a pattern suchthat the pattern of the first patterning device and the pattern of thesecond patterning device are adjacent to each other in a scanningdirection; accelerating the first patterning device to a firstpredetermined speed relative to the projection system; accelerating thesubstrate to a predetermined scanning speed relative to the projectionsystem; projecting the pattern of the first patterning device onto afirst field of the substrate while substantially maintaining thescanning speed; displacing the substrate substantially at thepredetermined scanning speed so as to skip an exposure of a non-zeronumber of exposure field pitch on the substrate arranged adjacent to thefirst field in the scanning direction; accelerating the secondpatterning device to the first predetermined speed relative to theprojection system so as to expose the second pattern onto a second fieldof the substrate arranged adjacent to the non-zero number of exposurefield pitch on the substrate in the scanning direction; and projectingthe pattern of the second patterning device onto the second field of thesubstrate.

In an embodiment of the invention, there is provided a stage apparatusfor a lithographic apparatus that includes a projection systemconfigured to project a pattern onto a substrate, the stage apparatusincluding an object table configured to hold a first patterning deviceand a second patterning device, wherein the stage apparatus isconstructed and arranged to: (a) perform a scanning operation of thefirst and the second patterning device with respect to the projectionsystem, such that during the scanning operation a pattern of the firstpatterning device and a pattern of the second patterning device areprojected on the substrate, and (b) position the first and secondpatterning devices during the scanning operation such that a distancebetween the pattern of the first patterning device and the pattern ofthe second patterning device substantially equals a predeterminedfunction of a reduction factor of the projection system and a non-zeronumber of exposure field pitch of a field pattern of the substrate so asto expose a first exposure field with the first patterning device and asecond exposure field with the second patterning device, the secondexposure field being substantially spaced apart from the first exposurefield by the non-zero number of exposure field pitch

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will now be described, by way of exampleonly, with reference to the accompanying schematic drawings in whichcorresponding reference symbols indicate corresponding parts, and inwhich:

FIG. 1A depicts a lithographic apparatus according to an embodiment ofthe invention;

FIG. 1B shows a stage of the lithographic apparatus according to FIG.1A;

FIGS. 2 a-2 f schematically depict an exposure sequence according to thepresent invention;

FIG. 3 schematically depicts two dies composed of a plurality of fields;

FIG. 4 a schematically depicts a possible conventional exposuresequence;

FIG. 4 b schematically depicts a possible exposure sequence according toan embodiment of the present invention;

FIG. 4 c schematically depicts a possible further exposure sequenceaccording to an embodiment of the present invention;

FIG. 4 d schematically shows a number of edge fields and an exposuresequence according to an embodiment of the present invention.

FIG. 5 a schematically depicts a possible conventional exposure sequenceusing a pattern A;

FIG. 5 b schematically depicts a possible exposure sequence according toan embodiment of the present invention using a pattern A and a patternB;

FIGS. 6 a and 6 b schematically depict a possible exposure sequence toexpose parts of a die with different patterns.

FIG. 7 schematically depicts a stage apparatus according to anembodiment of the present invention;

FIG. 8 schematically depicts an alternative stage apparatus according toan embodiment of the present invention;

FIG. 9 a schematically depicts a second alternative stage apparatusaccording to an embodiment of the present invention;

FIG. 9 b schematically depicts a third alternative stage apparatusaccording to an embodiment of the present invention;

FIG. 10 schematically depicts an arrangement of four Y-blades;

FIG. 11 schematically depicts an XY-view on the arrangement of FIG. 10.

FIGS. 12 a-12 n schematically depict an operation sequence of a maskingdevice according to an embodiment of the present invention.

FIG. 13 a schematically depicts an XY view on an arrangement of fourY-blades and four X-blades;

FIG. 13 b schematically depicts a cross-sectional ZY-view (A-A′) on thearrangement of FIG. 13 a.

FIG. 13 c schematically depicts a ZY view on an arrangement of fiveY-blades and two X-blades;

FIG. 13 d schematically depicts an XY view on the arrangement of FIG. 13c;

FIG. 13 e schematically depicts a ZY view on an arrangement of threeY-blades and two X-blades;

FIG. 14 schematically depicts an arrangement for redirecting a radiationbeam to different parts of an illumination system;

FIGS. 15 and 16 schematically depict a device for redirecting aradiation beam;

FIG. 17 schematically depicts a front view of the arrangement of FIGS.15 and 16.

FIG. 18 schematically depicts the time domain graphs of radiation pulsesorigination of two radiation sources, the combined array of pulses andthe arrays of pulses sent to one of two illumination units;

FIG. 19 schematically depicts an illumination unit including a number ofoptical elements and a holder for holding two optical elements.

FIGS. 20 a and 20 b schematically depict two positions of the holder ofFIG. 19.

FIG. 20 c schematically depicts the position of the holder as a functionof time.

DETAILED DESCRIPTION

FIG. 1 a schematically depicts a lithographic apparatus according to oneembodiment of the invention. The apparatus includes:

an illumination system (illuminator) IL configured to condition aradiation beam B (e.g., UV radiation or EUV radiation).

-   -   a support structure (e.g., a mask table) MT constructed to        support a patterning device (e.g., a mask) MA and connected to a        first positioner PM configured to accurately position the        patterning device in accordance with certain parameters;    -   a substrate table (e.g., a wafer table) WT constructed to hold a        substrate (e.g., a resist-coated wafer) W and connected to a        second positioner PW configured to accurately position the        substrate in accordance with certain parameters; and    -   a projection system (e.g., a refractive projection lens system)        PS configured to project a pattern imparted to the radiation        beam B by patterning device MA onto a target portion C (e.g.,        including one or more dies) of the substrate W.

The illumination system may include various types of optical components,such as refractive, reflective, magnetic, electromagnetic, electrostaticor other types of optical components, or any combination thereof, fordirecting, shaping, or controlling radiation.

The support structure supports, i.e., bears the weight of, thepatterning device. It holds the patterning device in a manner thatdepends on the orientation of the patterning device, the design of thelithographic apparatus, and other conditions, such as for examplewhether or not the patterning device is held in a vacuum environment.The support structure can use mechanical, vacuum, electrostatic or otherclamping techniques to hold the patterning device. The support structuremay be a frame or a table, for example, which may be fixed or movable asrequired. The support structure may ensure that the patterning device isat a desired position, for example with respect to the projectionsystem. Any use of the terms “reticle” or “mask” herein may beconsidered synonymous with the more general term “patterning device.”

The term “patterning device” used herein should be broadly interpretedas referring to any device that can be used to impart a radiation beamwith a pattern in its cross-section such as to create a pattern in atarget portion of the substrate. It should be noted that the patternimparted to the radiation beam may not exactly correspond to the desiredpattern in the target portion of the substrate, for example if thepattern includes phase-shifting features or so called assist features.Generally, the pattern imparted to the radiation beam will correspond toa particular functional layer in a device being created in the targetportion, such as an integrated circuit.

The patterning device may be transmissive or reflective. Examples ofpatterning devices include masks, programmable mirror arrays, andprogrammable LCD panels. Masks are well known in lithography, andinclude mask types such as binary, alternating phase-shift, andattenuated phase-shift, as well as various hybrid mask types. An exampleof a programmable mirror array employs a matrix arrangement of smallmirrors, each of which can be individually tilted so as to reflect anincoming radiation beam in different directions. The tilted mirrorsimpart a pattern in a radiation beam which is reflected by the mirrormatrix.

The term “projection system” used herein should be broadly interpretedas encompassing any type of projection system, including refractive,reflective, catadioptric, magnetic, electromagnetic and electrostaticoptical systems, or any combination thereof, as appropriate for theexposure radiation being used, or for other factors such as the use ofan immersion liquid or the use of a vacuum. Any use of the term“projection lens” herein may be considered as synonymous with the moregeneral term “projection system.”

As here depicted, the apparatus is of a transmissive type (e.g.,employing a transmissive mask). Alternatively, the apparatus may be of areflective type (e.g., employing a programmable mirror array of a typeas referred to above, or employing a reflective mask).

The lithographic apparatus may be of a type having two (dual stage) ormore substrate tables (and/or two or more mask tables). In such machinesthe additional tables may be used in parallel, or preparatory steps maybe carried out on one or more tables while one or more other tables arebeing used for exposure.

The lithographic apparatus may also be of a type wherein at least aportion of the substrate may be covered by a liquid having a relativelyhigh refractive index, e.g., water, so as to fill a space between theprojection system and the substrate. An immersion liquid may also beapplied to other spaces in the lithographic apparatus, for example,between the mask and the projection system. Immersion techniques arewell known in the art for increasing the numerical aperture ofprojection systems. The term “immersion” as used herein does not meanthat a structure, such as a substrate, must be submerged in liquid, butrather only means that liquid is located between the projection systemand the substrate during exposure.

Referring to FIG. 1A, the illuminator IL receives a radiation beam froma radiation source SO. The source and the lithographic apparatus may beseparate entities, for example when the source is an excimer laser. Insuch cases, the source is not considered to form part of thelithographic apparatus and the radiation beam is passed from the sourceSO to the illuminator IL with the aid of a beam delivery system BDincluding, for example, suitable directing mirrors and/or a beamexpander. In other cases the source may be an integral part of thelithographic apparatus, for example when the source is a mercury lamp.The source SO and the illuminator IL, together with the beam deliverysystem BD if required, may be referred to as a radiation system.

The illuminator IL may include an adjuster AD for adjusting the angularintensity distribution of the radiation beam. Generally, at least theouter and/or inner radial extent (commonly referred to as σ-outer andσ-inner, respectively) of the intensity distribution in a pupil plane ofthe illuminator can be adjusted. In addition, the illuminator IL mayinclude various other components, such as an integrator IN and acondenser CO. The illuminator may be used to condition the radiationbeam, to have a desired uniformity and intensity distribution in itscross-section.

The radiation beam B is incident on the patterning device (e.g., maskMA), which is held on the support structure (e.g., mask table MT), andis patterned by the patterning device. Having traversed the mask MA, theradiation beam B passes through the projection system PS, which focusesthe beam onto a target portion C of the substrate W. With the aid of thesecond positioner PW and position sensor IF (e.g., an interferometricdevice, linear encoder or capacitive sensor), the substrate table WT canbe moved accurately, e.g., so as to position different target portions Cin the path of the radiation beam B. A possible arrangement of thepositioner PW and the substrate table WT are described in FIG. 1B.Similarly, the first positioner PM and another position sensor (which isnot explicitly depicted in FIG. 1A) can be used to accurately positionthe mask MA with respect to the path of the radiation beam B, e.g.,after mechanical retrieval from a mask library, or during a scan. Ingeneral, movement of the mask table MT may be realized with the aid of along-stroke module (coarse positioning) and a short-stroke module (finepositioning), which form part of the first positioner PM. Similarly,movement of the substrate table WT may be realized using a long-strokemodule and a short-stroke module, which form part of the secondpositioner PW. Alternatively, the object table MT or WT can be directlydriven by a drive arrangement including actuators and/or linear motorsrather than applying a cascaded arrangement as described in FIG. 1B.

In the case of a stepper (as opposed to a scanner) the mask table MT maybe connected to a short-stroke actuator only, or may be fixed. Mask MAand substrate W may be aligned using mask alignment marks M1, M2 andsubstrate alignment marks P1, P2. Although the substrate alignment marksas illustrated occupy dedicated target portions, they may be located inspaces between target portions (these are known as scribe-lane alignmentmarks). Similarly, in situations in which more than one die is providedon the mask MA, the mask alignment marks may be located between thedies.

FIG. 1B shows a substrate stage St (also called substrate chuck) as canbe applied in a lithographic apparatus according to FIG. 1A. The stageSt includes the non-stationary parts of the second positioner PW, amirror block MB, and the substrate table WT mounted to the mirror blockMB. In this example, the mirror block MB is provided withinterferometer-mirrors which are arranged for cooperation withinterferometers for measuring the position of the mirror block MB.

The second positioner PW is arranged for positioning the mirror block MBand the substrate table WT. The second positioner PW includes the shortstroke module (which is provided with a short stroke motor ShM) and thelong stroke module (which is provided with a long stroke motor LoM).

The long stroke motor LoM includes a stationary part LMS that can bemounted to a stationary frame or a balance mass (not shown) and anon-stationary part LMM that is displaceable relative to the stationarypart. The short stroke motor ShM includes a first non-stationary partSMS (that may be mounted to the non-stationary part LMM of the longstroke module) and a second non-stationary part SMM (that may be mountedto the mirror block MB).

It should be noted that the mask table MT and the first positioner PM(see FIG. 1A) may have a similar structure as depicted in FIG. 1B.

A so-called dual stage machine may be equipped with two or more stagesas described. Each stage can be provided with an object table (such asthe substrate table WT). In such an arrangement, a preparatory step suchas the measurement of a height map of the substrate disposed on one ofthe object tables can be performed in parallel with the exposure of thesubstrate disposed on another object table. In order to expose asubstrate that previously has been measured, the stages may changeposition from the measurement location to the exposure location (andvice versa). As an alternative, the object tables can be moved from onestage to another.

The apparatus as depicted in FIG. 1A could be used in at least one ofthe following modes:

1. In step mode, the mask table MT and the substrate table WT are keptessentially stationary, while an entire pattern imparted to theradiation beam is projected onto a target portion C at one time (i.e., asingle static exposure). The substrate table WT is then shifted in the Xand/or Y direction so that a different target portion C can be exposed.In step mode, the maximum size of the exposure field limits the size ofthe target portion C imaged in a single static exposure.

2. In scan mode, the mask table MT and the substrate table WT arescanned synchronously while a pattern imparted to the radiation beam isprojected onto a target portion C (i.e., a single dynamic exposure). Thevelocity and direction of the substrate table WT relative to the masktable MT may be determined by the (de-)magnification and image reversalcharacteristics of the projection system PS. In scan mode, the maximumsize of the exposure field limits the width (in the non-scanningdirection) of the target portion in a single dynamic exposure, whereasthe length of the scanning motion determines the height (in the scanningdirection) of the target portion.

3. In another mode, the mask table MT is kept essentially stationaryholding a programmable patterning device, and the substrate table WT ismoved or scanned while a pattern imparted to the radiation beam isprojected onto a target portion C. In this mode, generally a pulsedradiation source is employed and the programmable patterning device isupdated as required after each movement of the substrate table WT or inbetween successive radiation pulses during a scan. This mode ofoperation can be readily applied to maskless lithography that utilizesprogrammable patterning device, such as a programmable mirror array of atype as referred to above.

Combinations and/or variations on the above described modes of use orentirely different modes of use may also be employed.

FIGS. 2 a-2 f schematically depicts an exposure sequence according to anembodiment of the present invention that can be applied in alithographic apparatus.

FIG. 2 a schematically depicts two patterning devices including apattern 10, 11 disposed adjacent to each other in the scanning direction(Y-direction). The patterning devices can be arranged adjacent to aprojection system 12 of a lithographic apparatus. Both patterns arespaced apart in the Y-direction over a distance d. The distance d mayequal a predetermined function of the reduction factor of the projectionsystem 12 of the lithographic apparatus and a non-zero number ofexposure field pitches of a field pattern of the wafer (or substrate).The exposure field pitch can be defined as length in the scanningdirection of a field to be exposed on the substrate. As an example, thedistance d can be substantially equal to the reduction factor of theprojection system of the lithographic apparatus multiplied with theexposure field pitch of the field pattern on the wafer. In case bothpatterns 10, 11 substantially have the same length in the Y-direction,the distance d may correspond to the length of the patterns in theY-direction. Other parameters such as the gap between two adjacentfields on the substrate may also be applied in the predeterminedfunction that defines the distance d (see e.g., eq. (1)). In thearrangement as shown in FIGS. 2 a-2 f, both patterns 10,11 substantiallyhave the same length in the Y-direction and the distance d substantiallycorresponds to this length.

FIG. 2 a further shows a projection beam 15, a projection system 12 anda substrate 17 whereon the patterns are to be projected (in general, thesubstrate is mounted on a substrate stage, not shown in this figure).Each patterning device can be mounted on a separate object table or bothpatterning devices can be mounted on a common object table. The objecttable or tables can be mounted on a stage apparatus including apositioning device for positioning the object table or object tables. Inorder to perform this positioning, the positioning device may include aplurality of linear motors and/or actuators for positioning the objecttable or object tables. For clarity reasons, FIGS. 2 a-2 f do not showthe object tables or the positioning device.

It should be noted that an arrangement as described (i.e., anarrangement including two patterning devices) enables the use ofpatterning devices having standardized dimensions. The use of anenlarged single patterning device including two patterns adjacent toeach other (as, e.g., disclosed in U.S. Pat. No. 6,383,940 wherein twopatterns are provided on one patterning device having a comparativelysmall gap between the patterns) may pose problems in that not alllithographic apparatuses are arranged to handle patterning devices thatare larger that the industry standard. Furthermore, in case differentillumination settings are desired for the exposure of the differentpatterns, providing a comparatively small gap between the two adjacentpatterns may provide insufficient time to change the illuminationsettings in between the two exposures. Increasing this gap would howeverincrease the problem to handle the enlarged patterning device.Increasing the time to change the illumination settings by decreasingthe scanning velocity may reduce the number of substrates that can beprocessed per unit of time.

Prior to the exposure of the first pattern 11, both the positioningdevice provided with the patterning devices and the substrate table canbe accelerated to a predetermined speed. Once they are synchronized, theprojection of the first pattern 11 on the substrate can start (FIGS. 2 b& 2 c) resulting in the exposure of the first field 13 (FIG. 2 d) by theradiation beam 15. The radiation beam 15 has a width w in theY-direction, also referred to as the slit-width w. When the first fieldhas been exposed, both the positioning device and the substrate tablecan substantially maintain their speed. When proceeding at that speed,the substrate table can be displaced over a distance substantially equalto the length of a field in the Y-direction (i.e., one exposure field is‘skipped’) between the exposure of the first pattern and the exposure ofthe second pattern. Proceeding with substantially the same speed, thesecond pattern can subsequently be projected onto a second field 14(FIGS. 2 e & 2 f). As a result of this process, two fields are exposedon the substrate, both fields being spaced apart over a distancesubstantially equal to the length of the field in the Y-direction, i.e.,in the arrangement as shown, one field is left unexposed between fields13 and 14.

It will be appreciated that both patterns may not be maintained at afixed distance apart during the entire scan operation. Depending on thelayout of the stage apparatus, a different approach can be adopted (seee.g. FIGS. 7 and 8). In an embodiment, in order to project the secondpattern 10 at the appropriate target position on the substrate, thesecond pattern moves in synchronism with the substrate when the targetposition for the second pattern on the substrate is reached by thesubstrate stage. In case the stage apparatus is arranged in such mannerthat the patterning devices can be displaced relative to each other(e.g. because they are provided on separate object tables that can bedisplaced independently), each patterning device is independentlydisplaceable and may follow its own trajectory. As such, the secondpatterning device can be brought up to speed independently of the firstpatterning device; the distance between both patterning devices maytherefore vary during the scan operation.

The size of the exposed fields on the substrate may correspond to thesize of the die that is manufactured. Alternatively, the exposed fieldmay only be a part of the die; as such, the die may include a number ofadjacent fields that may require exposure by different patterns. Oncethe different fields of such a die are exposed, so-called stitchingtechniques can be applied to connect the different fields. Connectingthe different fields that form a die may e.g. be obtained by asubsequent exposure of these fields. As an example, FIG. 3 schematicallydepicts two dies 18 arranged adjacent to each other. Each die includesfour different fields (indicated as A, B, C and D) require a differentexposure.

In practice, a small gap 6 may remain between adjacent dies on asemiconductor substrate (or wafer) in order to easily separate theindividual dies (FIG. 3). Therefore, in case the exposure field sizecorresponds to the die size, the distance d between the first and secondpattern provided on the positioning device may be set according to thefollowing equation:d=(Fs+2·δ)·Rf  (1)

wherein:

Fs=the exposure field size (or die size) on the substrate

δ=the gap between adjacent dies on the substrate

Rf=the reduction factor of the projection system (usually 4 or 5)

(Fs+2δ) corresponds to the gap between a first exposure field in a rowof fields arranged in the scanning direction and a third exposure fieldin this row (see e.g., the distance between dies 25 and 26 in FIG. 4 b).When the distance d between the first and second pattern is setaccording to equation (1), both the patterning devices and the substratecan substantially maintain their speed in between the exposure of thefirst and second pattern. In general, δ will be small compared to Fs,therefore, d can approximately be set to Fs·Rf.

In case the exposure field size does not correspond to the die size, thegap between adjacent exposure fields can be much smaller than δ, or maybe non-existent (as schematically indicated by the adjacent fields A andB in FIG. 3).

Depending on the actual arrangement of the fields that are exposed, aperson skilled in the art can calculate the desired distance between thetwo patterns on the patterning devices such that both the patterningdevices and the substrate can substantially maintain their speed inbetween the exposure of the first and second pattern. As an example(referring to FIG. 3), in order to expose the fields A and B of dies 18and 19 of FIG. 3, the patterning devices for exposing these fields canbe arranged such that the distance between the patterns in theY-direction equals (a+b+δ)·Rf, wherein a and b correspond to the lengthof fields A and B in the Y-direction (see FIG. 3).

The required time Te to expose a field in a step and scan process can beapproximated by the following formula:

$\begin{matrix}{T_{e} = {\frac{Y}{v} + \frac{2 \cdot v}{a}}} & \left( {2a} \right)\end{matrix}$

wherein:

Y=distance to be traveled at constant speed (equal to field-sizeFs+slit-width w)

v=velocity during scanning

a=maximum acceleration of the positioning device holding the substrate

For a given value of Y and a, the velocity can be optimized to minimizethe exposure time T_(e). The optimized velocity V_(opt) is found to be

$\begin{matrix}{V_{opt} = \sqrt{\frac{Y \cdot a}{2}}} & \left( {2b} \right)\end{matrix}$

In a conventional lithographic apparatus, a double exposure of a fieldmay require approximately twice this time.

In case the apparatus is arranged to expose fields on a substrate asindicated in FIGS. 2 a-2 f, the time for exposing two fields T_(e2) canbe approximated by:

$\begin{matrix}{T_{e\; 2} = {\frac{Y^{\prime}}{v} + \frac{2 \cdot a}{v}}} & \left( {3a} \right)\end{matrix}$

wherein Y′ corresponds to the distance that can be traveled atsubstantially constant speed during the exposure of the two fields andin between the two exposures. In case Y′ is approximated by three timesY (the field-size Fs+the slit-width w), the optimal velocity of equation(3a) V_(opt2) can be found to be sqrt(3) times higher than the optimalvelocity of eq. (2a):

$\begin{matrix}{V_{{opt}\; 2} = {\sqrt{\frac{Y^{\prime} \cdot a}{2}} \approx \sqrt{\frac{3 \cdot Y \cdot a}{2}} \approx {\sqrt{3} \cdot V_{opt}}}} & \left( {3b} \right)\end{matrix}$

It should be noted that during T_(e2), two fields can be exposed. Byapplying the optimal velocity according to equations 2b or 3b inrespective equations 2a and 3a, one can deduce that the time requiredper exposure is significantly smaller when the sequence described inFIGS. 2 a-2 f is applied instead of a conventional scanning sequence. Inaddition to the reduced exposure time (per field), it should be notedthat the number of moves that are desired in the non-scanning direction(X-direction) are also reduced (see e.g., FIGS. 3 a and 3 b) As aresult, the time to process a substrate can be reduced by approximately30%.

Based on the above, it should be noted that embodiments of the presentinvention may also result in an improved throughput (the number ofsubstrates processed per unit of time) in a single exposure situation(i.e., a situation wherein each field on the substrate only requiresexposure by one pattern) by applying two substantially identicalpatterns on the stage apparatus.

The following figures schematically illustrate an exposure sequence of anumber of fields on a substrate comparing a conventional approach withan approach according to an embodiment of the present invention. In theexamples shown in FIGS. 4 a-4 d, 5 a and 5 b, the exposure field size isassumed to correspond to the die size. FIG. 4 a schematically depicts apossible exposure sequence of a number of fields 21 on a substrate 20,the arrows indicating the order in which the fields are exposed. Alsoindicated in FIG. 4 a are the exposure field size Fs and the gap δbetween adjacent fields as used in equation (1). In between the exposureof two consecutive fields, the object tables provided with thepatterning devices and the substrate ‘turn around,’ i.e., they arerepositioned to expose the next field by a scanning movement in theopposite direction, and in addition to that, the object table providedwith the substrate is also repositioned in the non-scanning direction(X-direction). The combined movement in the scanning direction(Y-direction) and the non-scanning direction (X-direction) is indicatedby the curved arrows 22.

FIG. 4 b schematically depicts a possible exposure sequence for a numberof fields on a substrate 20 using a lithographic apparatus according toan embodiment of the present invention, including a stage apparatusprovided with two patterning devices including substantially identicalpatterns, the patterns being displaced over a distance equal to thelength of the pattern in the scanning direction (or, e.g., the lengthaccording to eq. (1)).

FIG. 4 b schematically depicts the order in which the different fieldsmay be exposed using the stage apparatus as described. The exposureprocess starts with field 25, followed by field 26. Between the exposureof field 25 and the exposure of field 26, both stage apparatus andsubstrate stage (i.e., the stage provided with the substrate) may remainat substantially the same (scanning) speed. After the exposure of field26, both stage apparatus and substrate stage decelerate and acceleratein the opposite direction (−Y) in order to expose field 27 and 28. Oncethe indicated fields are exposed, the fields that are indicated in FIG.4 c may be exposed, using a similar approach. It will be appreciated bya person skilled in the art that a substantial part of the substrate maybe exposed using the described process resulting in an importantreduction of the time to process a substrate. As a consequence, thenumber of substrates processed per unit of time (i.e., the throughput ofthe apparatus) can be improved. It should further be noted thatembodiments of the present invention may also be applied for theexposure of so-called edge fields or edge dies. Edge fields are exposurefields that are partly located outside the substrate area (FIG. 4 d).FIG. 4 d schematically shows a number of edge fields 29 and an exposuresequence (indicated by the arrows) according to an embodiment of thepresent invention. The exposure of the edge dies can be done in order tofacilitate the further processing of the substrate.

The apparatus according to an embodiment of the present invention mayalso be applied in case a double exposure is desired for each field onthe substrate. Assuming the stage apparatus is provided with twopatterning devices including a pattern A (e.g., a phase shift mask) anda pattern B (e.g., a trim mask or a binary mask) to be applied on thesubstrate. It is assumed that the patterns are arranged such that thestage apparatus can maintain a substantially constant speed during theexposure of the substrate with the patterns and in between theexposures.

In a first act of the double exposure process, fields 30, 31, 32 and 33(see FIG. 5 a) may be exposed in a conventional manner using pattern A(the trajectory followed by the substrate stage is indicated by thearrows). In a second act (FIG. 5 b), fields 35, 36, 37 and 38 may beexposed using pattern A and fields 30, 31, 32 and 33 are exposed withpattern B according to the process described in FIGS. 2 a-2 f. As aresult of acts one and two, fields 30, 31, 32 and 33 have been exposedto both the pattern A and the pattern B.

It will be clear to a person skilled in the art that a similar proceduremay be applied in case the dies on the substrate are composed ofdifferent adjacent fields (see e.g., FIG. 3). FIGS. 6 a and 6 bschematically depict the exposure sequence in case the dies on the waferare composed of four fields as indicated in FIG. 3 and the patterningdevices are arranged to expose fields A and B. FIG. 6 a schematicallyshows a first sequence of exposures of fields A and B. The exposureorder is indicated by the arrows. FIG. 6 b schematically depicts asubsequent exposure sequence. The fields exposed in the first sequenceare indicated with a striped pattern.

FIG. 7 schematically discloses a stage apparatus according to anembodiment of the present invention. The apparatus includes anarrangement including two object tables 40, 41. On each object table, apatterning device 42, 43 may be arranged, each patterning deviceincluding a pattern 44, 45. The apparatus further includes two actuatorarrangements 46 and 47 for displacing and positioning the object tablesover comparatively small distances. In order to enable thesedisplacements, the actuator arrangement may, as an example, includepiezo-actuators or electromagnetic actuators. In a preferred embodiment,the actuator arrangement enables positioning of the object table in sixdegrees of freedom. In the apparatus as shown in FIG. 7, both actuatorarrangements 46 and 47 may be mounted on a common first part 48 of alinear motor assembly for displacing the object tables overcomparatively large distances in the Y-direction (the scanningdirection). The linear motor assembly further includes a second part 49constructed and arranged to co-operate with the first part forgenerating the required thrust in the Y-direction. In general, one partof the linear motor may include an array of alternating polarizedpermanent magnets, arranged in the Y-direction while the other partincludes an array of coils arranged adjacent to each other in theY-direction.

In the described arrangement, the actuator assemblies are constructed toenable a positioning of both patterns such that the distance d betweenboth patterns may be made substantially equal to a predeterminedfunction of the reduction factor of the projection system and a non-zeronumber of exposure field pitches of a field pattern of the substrate. Asan example, d may be made equal to the length of a pattern in theY-direction or equal to a value determined using equation (1). In orderto accommodate patterns of different sizes (e.g., varying from 30 mm to100 mm), the desired displacement of the object tables relative to thefirst part 48 (by the actuator assemblies) may be in the order of about40-50 mm.

Alternatively, rather than mounting both actuator assemblies on a commonpart of a linear motor assembly, each actuator assembly may be arrangedon a separate linear motor part. This is illustrated in FIG. 8. FIG. 8schematically describes a stage arrangement including two object tables40, 41 provided with a patterning device 42, 43, each object table beingmounted on an actuator assembly 46, 47. Each actuator assembly ismounted on a first linear motor part 50, 51 constructed and arranged toco-operate with a common second part 52. In this arrangement, thedistance between both patterns 44 and 45 provided on the patterningdevices may be adjusted using the linear motors.

As such, the distance between the patterning devices 42, 43 does notneed to remain constant during the entire scan operation; in order toperform the combined projection of the first and second pattern 44, 45,a synchronous move of the patterning devices 42, 43 is not needed. Eachlinear motor of the stage assembly can be operated independently.

As such, in an embodiment, the scan operation can be performed asfollows:

In order to project the first pattern 44 onto the substrate, the firstlinear motor of the stage assembly (i.e., linear motor part 50co-operating with the second part 52) and the actuator assembly 46 thatis provided with the first patterning device 42 can be accelerated to apredetermined speed after which the projection of the first pattern on atarget portion of the substrate can be performed. In order to projectthe second pattern 45 at the appropriate target position on thesubstrate, the second pattern moves in synchronism with the substratewhen the target position for the second pattern on the substrate isreached by the substrate stage. As such, the acceleration of the secondlinear motor (i.e., linear motor part 51 co-operating with the secondpart 52) can be performed independent of the acceleration of the firstlinear motor. The acceleration profile of both linear motors may dependon the actual relative position of both linear motors prior to the scanoperation. In case the distance between both patterns 44 and 45 issmaller that the distance d as defined above, the second linear motormay, e.g., start accelerating at the same time as the first linearmotor, but with a smaller acceleration in order to arrive at theappropriate position. Alternatively, the second linear motor may startaccelerating somewhat later than the first linear motor. In order toobtain such behavior, the lithographic apparatus can be provided with acontrol device arranged to synchronize the first pattern with the targetposition of the first pattern on the substrate and to synchronize thesecond pattern with the target position of the second pattern. Toachieve this, the control unit may generate a set-point (e.g., aposition trajectory or a velocity trajectory) for each patterningdevice.

An additional benefit of the arrangement shown in FIG. 8 is that thedesired displacements of the actuator assembly may be substantiallyreduced compared to the arrangement of FIG. 7. As an example, it may besufficient to provide an actuator assembly suited for displacements <1mm in the required degrees of freedom. As a consequence, the actuatorassembly may be made substantially smaller and lighter. Rather thanhaving common second part for the linear motors, each linear motor maybe provided with its own second part co-operating with the first part50, 51. It will be clear to a person skilled in the art that in such anarrangement, both linear motors may also move independently (similar tothe arrangement of FIG. 8), the acceleration profile of both motors maytherefore be different. As such, the distance between both patterningdevices may vary during the scan operation.

As a second alternative, both patterning devices may be arranged on acommon object table constructed to hold both patterning devices in sucha configuration that the distance d between both patterns issubstantially equal to a predetermined function of the reduction factorof the projection system and a non-zero number of exposure field pitchesof a field pattern of the substrate. As an example, d may be equal tothe length of a pattern in the Y-direction or equal to a valuedetermined using equation (1). Such an arrangement is schematicallydepicted in FIG. 9 a.

It will be appreciated that an exact correspondence between the distancebetween both patterns and the distance obtained from equation (1) is nota requirement because the actuator assembly and/or linear motor can beused to change the relative position of the patterning devices relativeto the substrate. This can be illustrated as follows: Assuming thedistance between both patterns provided on the object table is somewhatsmaller than the distance d according to equation (1). In such asituation, the second pattern would arrive too soon at the exposeposition when no measures are taken. In order to avoid this, theactuator assembly and/or linear motor may decelerate to a lower speedand accelerate again between the exposure of the first pattern and thesecond pattern to ensure that the second pattern moves in synchronismwith the substrate when the target position for the second pattern onthe substrate is reached by the substrate stage. It will be clear to aperson skilled in the art that such a correction (i.e., ensuring thatboth substrate and second pattern arrive at the same time at the exposeposition) may also be performed using the drive arrangement of thesubstrate table.

FIG. 9 a schematically depicts an object table 55 provided with twopatterning devices 56, 57, each provided with a pattern 58, 59. Theobject table 55 is mounted to an actuator assembly 60 for displacing theobject table over comparatively small distances. The actuator assemblyis mounted to a first part 61 of a linear motor that is constructed andarranged to co-operate with a second part 62 for displacing the objecttable over comparatively large distances in the Y-direction. As a thirdalternative, the object table (or object tables) may be directly drivenby a drive arrangement including actuators and/or linear motors ratherthan applying a cascaded arrangement as described in FIGS. 7, 8 or 9 a.FIG. 9 b schematically depicts such an arrangement. The arrangementincludes an object table 55 provided with two patterning devices 56, 57,each provided with a pattern 58, 59 and a drive arrangement 70 includinga first part 71 and a second part 72. The drive arrangement may, as anexample, include a linear motor and a plurality of actuators forpositioning the object table 55. The first part 71 may, as an example,include a plurality of coils interacting with a plurality of permanentmagnets arranged on the second part 72 in order to displace and positionthe object table 55. It will be appreciated that the stage apparatus mayalso includes a first drive arrangement similar to the drive arrangement70 for displacing and positioning a first object table provided with afirst patterning device and a second drive arrangement similar to thedrive arrangement 70 for displacing and positioning a second objecttable provided with a second patterning device.

The object table of FIGS. 9 a or 9 b or the object tables of FIGS. 7 and8 may be provided with a holding device for holding the patterningdevices. Such a holding device may include vacuum pads or clamps,electrostatic clamps or mechanical clamps for holding the patterningdevices and maintaining the position of the patterning devices relativeto the object table or object tables substantially constant during theexposure process.

In order to determine the position of the patterning devices relativeto, e.g., a reference frame or a projection system, a measurement systemsuch as an interferometer system or an encoder system may be applied. Ingeneral, an encoder system may include a reading head and a grating. Thegrating may be one dimensional or two dimensional. As an example, theobject table or object tables depicted in FIGS. 7 to 9 b may be providedwith one or more encoder reading heads constructed and arranged toco-operate with one or more gratings arranged adjacent to the objecttables. In case two object tables are applied, each provided with one ormore encoder reading heads, the reading heads can be arranged toco-operate with a common linear or two-dimensional grating. As such, therelative position of both object tables can be determined. By usingmultiple reading heads in combination with multiple gratings, theposition of the object table(s) can be determined in more than onedegree of freedom (up to 6 degrees of freedom). The use of encodersystems is more extensively explained in U.S. Patent ApplicationPublication No. 2004-0263846, incorporated herein by reference.

Embodiments of the present invention further provides in a maskingdevice suitable to co-operate with a stage apparatus as described.

In a lithographic apparatus, a masking device is often applied to ensurethat only a certain part of the pattern is imaged by the projection beamto the substrate. An example of such a masking device is described inU.S. Patent Application Publication No. 2005-0012913, incorporatedherein by reference. In order to stop or to mitigate stray light fromimpinging on the substrate, a masking device may be applied. In alithographic projection system, this functionality is typically achievedby providing a masking device at an intermediate plane in theillumination system.

Masking devices usually include one or more sets of movable blades. Eachset of blades may be mechanically coupled to a support and each supportmay be mounted on a common frame. The sets of blades may be mechanicallycoupled or uncoupled. A masking device as described may include a firstset of blades arranged to move together and apart in a scanningdirection (the Y-direction), hereinafter referred to as the Y-blades,and a second set of blades is arranged to move together and apart in adirection perpendicular to the scanning direction (the X-direction),hereinafter referred to as the X-blades.

In case the masking device is applied in a lithographic apparatusprovided with a stage apparatus provided with two patterns arrangedadjacent to each other in the scanning direction, it may be beneficialto apply a masking device as described in the following figures.

In general, the masking device according to embodiments of the presentinvention includes a first masking part for obscuring a first part of afirst patterning device before a pattern of the first patterning deviceis imparted by the radiation beam, a second masking part for obscuring asecond part of the first patterning device after the pattern of thefirst patterning device is imparted by the radiation beam and forobscuring a first part of the second patterning device before a patternof a second patterning device is imparted by the radiation beam and athird masking part for obscuring a second part of the second patterningdevice after the pattern of the second patterning device is imparted bythe radiation beam.

FIG. 10 schematically depicts an arrangement of four so-called Y-blades80, 81, 82, 83 arranged adjacent to each other in the Y-direction. Theblades are displaceable in the Y-direction by, e.g., electromagneticactuators or linear motors (not shown). FIG. 11 schematically shows anXY-view of the same blades. By displacing blades 80 and 81 relative toeach other in the Y-direction, the gap 90 can be adjusted. Similar, bydisplacing blades 82 and 83 relative to each other in the Y-direction,the gap 91 can be adjusted.

In order to project the pattern onto a substrate, the following sequencemay be applied.

FIG. 12 a schematically depicts an initial arrangement of the Y-blades,the projection beam 95 (originating from an illumination system 96), anarrangement of two patterning devices 84, 85 including a pattern 98, 100arranged at a predefined distance apart in the Y-direction. Initially,blade 83 blocks the projection beam, the blades and the arrangementincluding the patterns are virtually not moving. Starting from thisinitial position, the arrangement including the patterns and blade 83may accelerate (FIG. 12 b) in order both to be at synchronized speedwhen the pattern can be imparted by the projection beam (FIG. 12 c). Atthis point, the projection of the edge of blade 83 substantiallycorresponds to the edge of the first pattern, thereby obscuring a firstpart 101 of the first patterning device. Blade 83 and the arrangementincluding the patterns may subsequently proceed at their synchronizedspeed (FIG. 12 d). At some point, blades 81 and 82 may accelerate (FIG.12 e), in order to obtain a synchronized speed and position with thesecond edge of the first pattern when this edge is imparted by theprojection beam (FIG. 12 f), thereby obscuring a second part 102 of thefirst patterning device. Although FIG. 12 e and 12 f show that blade 80also accelerates together with blades 81 and 82, this is not an absoluterequirement. It is desired that the edge of blade 80 is synchronizedwith the second edge of the second pattern when this edge is imparted bythe projection beam (see FIG. 12 l). When blades 81 and 82 aresynchronized with the arrangement including the patterns, both theblades and the arrangement may proceed at constant velocity (FIGS. 12 g,12 h). Because the blades 81 and 82 are arranged in such manner that theprojection of the edge of blade 81 corresponds to the first edge of thesecond pattern (thereby obscuring a first part 103 of the secondpatterning device) when the projection of the edge of blade 82corresponds to the second edge of the first pattern, blade 81 is alreadyin the appropriate position for the exposure of the second pattern (FIG.12 i). Once the projection beam no longer imparts the first edge of thesecond pattern (FIG. 12 j), blades 81, 82 and 83 can be brought to astop. Note that blade 80 is held at a position not interfering with theprojection beam (FIGS. 12 i, 12 j). When the second edge of the secondpattern approaches the projection beam, blade 80 is brought up to speedin synchronism with the arrangement including the patterns to arrive atthe position depicted in FIG. 12 l, thereby obscuring a second part 104of the second patterning device. Blade 80 and the arrangement includingthe patterns then proceed at substantially constant speed (FIG. 12 m)until the projection beam can be blocked by the blade 80 (FIG. 12 n).Once this position is reached, both blade 80 and the arrangementincluding the patterns may start decelerating resulting in a positionthat is substantially the mirror-image of the position shown in FIG. 12a.

During the exposure sequence as described in FIGS. 12 a-12 n, the secondset of blades, the X-blades remain at a predefined distance in theX-direction. An example of an arrangement of the X-blades (together withthe Y-blades) is shown in FIG. 13 a. FIG. 13 a schematically depicts anXY-view of the four Y-blades 80, 81, 82 and 83 as shown in FIG. 11together with four X-blades 105, 106, 107, 108. The X- and Y-blades arearranged in such manner that the edges of the blades that define thenon-obscured area are substantially arranged in the same Z-plane. FIG.13 b shows the A-A′ cross-section. In the arrangement as shown, theX-blades 107 and 108 also need to be displaced in the Y-direction inorder to allow blade 81 to displace in the Y-direction (see FIG. 13 b).

FIG. 13 c schematically depicts a YZ view of an alternative arrangementincluding 4 Y-blades 110, 111, 112 and 113 that are arranged at the sameZ-position. Blades 110, 111, 112 and 113 can be used in a similar manneras the blades 80, 81, 82 and 83 in the sequence described in FIGS. 12 ato 12 n. In order to accommodate for different distances between thepatterns arranged on the support, blades 111 and 112 can be made shorterthan the corresponding blades 81 and 82 in the arrangement of FIG. 13 b.As a consequence, a gap may occur between the blades 111 and 112 (seeFIG. 13 c) in the Y-direction when the blades are set to span thedistance between the patterns in the Y-direction. This gap may becovered by an additional Y-blade 114 to avoid impinging of the radiationbeam. As an alternative to covering the gap using an additional blade,the radiation beam can be shut during the transition of the gap betweenthe blades. As can be seen from FIG. 13 c, a displacement of theY-blades in the Y-direction does not impose a displacement of theX-blade 115, i.e., the X-blade 115 can remain at the same Y-positionduring the entire exposure sequence. FIG. 13 d schematically shows an XYview of the arrangement of FIG. 13 c. FIG. 13 d schematically shows theY-blades 110, 111, 112 and 113, the optional Y-blade 114 and twoX-blades 115 and 116.

FIG. 13 e shows yet another alternative arrangement of the maskingdevice including 3 Y-blades 117, 118 and 119. In the arrangement asshown, the Y-blade 118 can be used to follow the second edge of thefirst pattern (comparable to the functionality of blade 82 in FIG. 12 f)during exposure of the first pattern and to follow the first edge of thesecond pattern (comparable to the functionality of blade 81 in FIG. 12i) during the exposure of the second pattern. As such, the blade 118combines the functionality of blades 81 and 82 in the exposure sequenceshown in FIGS. 12 a to 12 n. Because, in general, the length of theblade 118 in the Y-direction may not be equal to the distance betweenboth patterns in the Y-direction, a relative displacement of the blade118 with respect to the patterns may be required when the blade obscuresthe radiation beam (i.e., the situation depicted in FIG. 12 h).

It should be noted that a conventional masking device may also beapplied. In such an arrangement, the Y-blades have to return to theirinitial position during the time frame between the exposure of the firstpattern and the exposure of the second pattern.

In case a double (or multiple) exposure is desired, it may also berequired to apply different illumination setting for the exposure of thepatterns. In order to provide the different illumination settings duringthe exposure of the different patterns, the following arrangement may beapplied. FIG. 14 schematically describes an arrangement of two radiationsources 120, 122. The radiation beams originating from these sources arecombined into one radiation beam 126 that may be applied in an(optional) first illuminator part 128 after which the radiation beam issent to either illumination unit 130 or illumination unit 132 using adevice 134. As such, the optical path of the illumination systemincludes a first branch 133 via the illumination unit 130 and a secondbranch 135, parallel to the first branch, via the illumination unit 132.In these illumination units, different settings may be applied (e.g.,dipole illumination in one part 130 and quadrupole illumination in theother part 132 or dipole illumination in both parts but with a differentorientation). The outcoming radiation beams of either part 130 or 132are further projected to the same location by a second device 136 thatmay be identical to the device 134. The device 136 ensures that theappropriate beam (either the beam originating from illumination unitpart 130 or the beam originating from the illumination unit 132) isimparting the appropriate pattern. As such, the radiation beamoriginating from the (optional) illuminator part 128 is directed toeither the first branch 133 or the second branch 135, such that theradiation beam may be configured by the first illumination unit duringthe exposure of a first exposure field with a pattern of a firstpatterning device and that the radiation beam is configured by thesecond illumination unit during the exposure of a second exposure fieldwith a pattern of a second patterning device.

An example of such a device 136 (and device 134) is shown in FIG. 15.FIG. 15 schematically depicts a device 136 including two prisms 137, 138arranged adjacent to each other in the Y-direction. The prisms 137 and138 may be displaced along the Y-direction using an actuator or a linearmotor (not shown). When the device 136 is in a position as shownrelative to a radiation beam 140, this beam can be deflected into theZ-direction. In case the prisms are displaced along the Y-direction (asshown in FIG. 16) the radiation beam 142 (which is parallel to beam 140)can be deflected into the Z-direction. Using this device, two beamsoriginating from different illumination units may be projectedalternating on to a patterning device. This can be achieved bysynchronously displacing the device 134 and the arrangement includingthe patterning devices.

FIG. 17 shows an XZ-view of the device 136 (or 134).

It should be noted that the arrangement as shown in FIG. 14 may also beapplied using a single radiation source provided that this source ispowerful enough. As can be seen from eq. 3b, the optimized speed of thestage apparatus is substantially higher than in a conventionallithographic apparatus. As a consequence, a more powerful radiationsource may be desired to expose the substrate with the appropriate dose.In order to provide such a powerful radiation source, an arrangement asshown in FIG. 14 may be applied.

It should further be noted that the arrangement of FIG. 14 may beprovided with two conventional masking devices arranged in theillumination units 130 and 132, rather than applying a masking device asdescribed in FIGS. 10 to 13 e.

FIG. 18 schematically depicts the radiation pulses of both radiationsources 120 (graph a) and 122 (graph b) as a function of time togetherwith the combined radiation beam (graph c). Using the device 134 (seeFIG. 14) part of the combined radiation beam may be sent to illuminatorpart 130 (graph d) or to illuminator part 132 (graph e)

A benefit of the arrangement using the devices 134 and 136 is that thesedevices are comparatively small and light. Therefore, a comparativelysmall actuator or linear motor may be sufficient to displace thedevices. The devices 134 and 136 may also be driven by a common actuatoror motor.

Alternatively, rather than redirecting the radiation beam to either anillumination unit 130 or an illumination unit 132, an arrangement asdepicted in FIG. 19 may be applied. FIG. 19 schematically depicts anillumination system 160 including a number of optical elements 162 thatmay be imparted by a radiation beam 164. The illumination system furtherincludes a holder 166 for holding two (or more) optical elements 168,170. The optical elements may be arranged adjacent to each other. Thearrangement may include an actuator or linear motor for displacing theholder 166 with the optical elements in the direction indicated by thearrow 172. By doing so, one can ensure that the radiation beam isimparted by the optical element 168 during the exposure of a firstpattern of an arrangement as shown in FIGS. 12 a-12 n, and that theradiation beam is imparted by the second optical element 170 during theexposure of a second pattern of the arrangement as shown in FIGS. 12a-12 n. Alternatively, the optical elements may be mounted on a rotatingdisc driven by a rotary motor.

The arrangement of FIG. 19 enables the use of only one illuminationsystem. In case more than one optical element needs to be changedbetween both exposures, further holders can be applied. Those multipleholders may be driven by the same actuator. It should be noted that,alternatively, the illumination system may be provided with a holder foreach optical element rather than having a common holder for bothelements. Each of the holders may be driven either independently by,e.g., a linear motor or they may be driven by a common linear motor.

As an example, the arrangement as shown in FIG. 19 may be applied to usedifferent ‘diffractive optical elements’ during the exposure of thefirst and second patterns. Such elements may be applied to change theintensity distribution of a radiation beam of the illumination system.In order to change between a first intensity distribution for theexposure of the first pattern and a second intensity distribution forthe exposure of the second pattern, the holder 166 of the arrangement ofFIG. 19 may include two diffractive optical elements arranged adjacentto each other. In order to ensure that the appropriate intensitydistribution is applied, the holder 166 including the diffractiveoptical elements can be displaced in synchronism with the stage providedwith the first and second pattern such that the radiation beam isimparted or reflected by the first diffractive optical element duringthe exposure of the first pattern and that the radiation beam isimparted or reflected by the second diffractive optical element duringthe exposure of the second pattern.

It should be noted that in case the optical elements are arranged in afield plane of the illumination system, they are allowed to displaceduring the exposure process. As an example, a linear motor (or motors)may be arranged to perform a displacement as indicated in the FIGS. 20 ato 20 c. FIG. 20 a schematically depicts an initial position (theinitial position is designated by f) of the holder 166 including theoptical elements. FIG. 20 c schematically depicts the position (theposition reference axis P is indicated in FIGS. 20 a and 20 b) of theholder 166 as a function of time. FIG. 20 b schematically depicts theposition of the holder 166 in the position ‘−f’.

The arrangement as shown in FIG. 19 may also be applied to positiondifferent optical elements (such as diaphragm's) in a pupil plane of theillumination system. In that case, the optical elements should remainstationary during the exposure process and may only be displaced inbetween two consecutive exposures.

As an alternative to applying different optical elements, a programmablemirror array may also be applied to provide a change in the intensitydistribution for the exposure of the first and second pattern.

Although specific reference may be made in this text to the use oflithographic apparatus in the manufacture of ICs, it should beunderstood that the lithographic apparatus described herein may haveother applications, such as the manufacture of integrated opticalsystems, guidance and detection patterns for magnetic domain memories,flat-panel displays, liquid-crystal displays (LCDs), thin-film magneticheads, etc. The skilled artisan will appreciate that, in the context ofsuch alternative applications, any use of the terms “wafer” or “die”herein may be considered as synonymous with the more general terms“substrate” or “target portion,” respectively. The substrate referred toherein may be processed, before or after exposure, in for example atrack (a tool that typically applies a layer of resist to a substrateand develops the exposed resist), a metrology tool and/or an inspectiontool. Where applicable, the disclosure herein may be applied to such andother substrate processing tools. Further, the substrate may beprocessed more than once, for example in order to create a multi-layerIC, so that the term substrate used herein may also refer to a substratethat already contains multiple processed layers.

Although specific reference may have been made above to the use ofembodiments of the invention in the context of optical lithography, itwill be appreciated that the invention may be used in otherapplications, and where the context allows, is not limited to opticallithography.

The terms “radiation” and “beam” used herein encompass all types ofelectromagnetic radiation, including ultraviolet (UV) radiation (e.g.,having a wavelength of or about 365, 355, 248, 193, 157 or 126 nm) andextreme ultra-violet (EUV) radiation (e.g., having a wavelength in therange of 5-20 nm), as well as particle beams, such as ion beams orelectron beams.

The term “lens,” where the context allows, may refer to any one orcombination of various types of optical components, includingrefractive, reflective, magnetic, electromagnetic and electrostaticoptical components.

While specific embodiments of the invention have been described above,it will be appreciated that the invention may be practiced otherwisethan as described.

The descriptions above are intended to be illustrative, not limiting.Thus, it will be apparent to one skilled in the art that modificationsmay be made to the invention as described without departing from thescope of the claims set out below.

1. A stage apparatus for a lithographic apparatus that includes aprojection system configured to project a pattern on a substrate, thestage apparatus comprising: a first object table configured to hold afirst patterning device; a second object table configured to hold asecond patterning device, each of the first and second patterningdevices including a pattern, and the first and second patterning devicesbeing arranged such that the pattern of the first patterning device andthe pattern of the second patterning device are adjacent to each otherin a scanning direction; a positioning device configured to position thefirst and second patterning devices and the substrate, and a controldevice configured to control the positioning device, the control deviceconstructed and arranged to provide the positioning device with aset-point adapted to: (i) accelerate the first patterning device to afirst predetermined speed relative to the projection system of thelithographic apparatus, (ii) accelerate the substrate to a predeterminedscanning speed relative to the projection system so as to project thepattern of the first patterning device onto a first field of thesubstrate while substantially maintaining said scanning speed; (iii)displace the substrate substantially at the predetermined scanning speedso as to skip an exposure of a non-zero number of unexposed exposurefield pitches on the substrate arranged adjacent to the first field inthe scanning direction; and (iv) accelerate the second patterning deviceto the first predetermined speed relative to the projection system so asto expose the second pattern onto a second field of the substratearranged adjacent to the non-zero number of unexposed exposure fieldpitches on the substrate in the scanning direction.
 2. The stageapparatus of claim 1, wherein the control device is constructed andarranged to position the first and second patterning devices during thescanning operation such that a distance between the pattern of the firstpatterning device and the pattern of the second patterning devicesubstantially equals a predetermined function of a reduction factor ofthe projection system and the non-zero number of exposure field pitchesof a field pattern of the substrate so as to expose a first exposurefield with the first patterning device and a second exposure field withthe second patterning device, the second exposure field beingsubstantially spaced apart from the first exposure field by the non-zeronumber of exposure field pitch.
 3. The stage apparatus of claim 2,wherein the distance between the pattern of the first patterning deviceand the pattern of the second patterning device substantially equals thereduction factor of the projection system multiplied by the non-zeronumber of exposure field pitches.
 4. The stage apparatus of claim 3,wherein the positioning device comprises a linear motor assemblyconfigured to displace the first and second object tables overcomparatively large distances in the scanning direction and an actuatorassembly configured to displace the first and second object tables in atleast a direction perpendicular to the scanning direction.
 5. The stageapparatus of claim 4, wherein said actuator assembly is arranged on afirst part of said linear motor assembly and wherein said actuatorassembly includes a first actuator configured to displace the firstobject table and a second actuator configured to displace said secondobject table.
 6. The stage apparatus of claim 5, wherein said actuatorassembly is configured to displace the first and second object tablesrelative to said first part in a range of about 40-50 mm.
 7. The stageapparatus of claim 1, wherein the non-zero number of exposure fieldpitches is selected such that an illumination setting of thelithographic apparatus is changed between successive exposures of thefirst exposure field and the second exposure field.
 8. The stageapparatus of claim 1, wherein the substrate is displaced substantiallyat the predetermined scanning speed so as to skip an exposure of anon-zero number of exposure field pitches on the substrate prior toexposing the second pattern.
 9. The stage of claim 1, wherein thenon-zero number of unexposed exposure field pitches is one.
 10. Alithographic apparatus comprising: (a) an illumination system configuredto condition a radiation beam; (b) a substrate table constructed to holda substrate; (c) a stage apparatus comprising: (i) a first object tableconfigured to hold a first patterning device; (ii) a second object tableconfigured to hold a second patterning device, each of the first andsecond patterning devices including a pattern to pattern the radiationbeam, and the first and second patterning devices being arranged suchthat the pattern of the first patterning device and the pattern of thesecond patterning device are adjacent to each other in a scanningdirection; (iii) a positioning device configured to position the firstand second patterning devices and the substrate, and (iv) a controldevice configured to control the positioning device; and (d) aprojection system configured to project the patterned radiation beamonto a target portion of the substrate such that during a scanningoperation the pattern of the first patterning device and the pattern ofthe second patterning device are projected on the substrate, wherein thecontrol device is constructed and arranged to provide the positioningdevice with a set-point adapted to: (1) accelerate the first patterningdevice to a first predetermined speed relative to the projection systemof the lithographic apparatus, (2) accelerate the substrate to apredetermined scanning speed relative to the projection system so as toproject the pattern of the first patterning device onto a first field ofthe substrate while substantially maintaining said scanning speed; (3)displace the substrate substantially at the predetermined scanning speedso as to skip an exposure of a non-zero number of unexposed exposurefield pitches on the substrate arranged adjacent to the first field inthe scanning direction; and (4) accelerate the second patterning deviceto the first predetermined speed relative to the projection system so asto expose the second pattern onto a second field of the substratearranged adjacent to the non-zero number of unexposed exposure fieldpitches on the substrate in the scanning direction.
 11. The lithographicapparatus of claim 10, further comprising a masking device, the maskingdevice comprising: a first masking part configured to obscure a firstpart of the first patterning device before the pattern of the firstpatterning device is imparted by the radiation beam, a second maskingpart configured to obscure a second part of the first patterning deviceafter the pattern of the first patterning device is imparted by theradiation beam and to obscure a first part of the second patterningdevice before the pattern of the second patterning device is imparted bythe radiation beam, and a third masking part configured to obscure asecond part of the second patterning device after the pattern of thesecond patterning device is imparted by the radiation beam.
 12. Thelithographic apparatus of claim 10, wherein the illumination systemcomprises: an optical path comprising a first branch and a secondbranch, said first branch coupled in parallel to the second branch, thefirst branch comprising a first illumination unit configured tocondition the radiation beam, and the second branch comprising a secondillumination unit configured to condition the radiation beam, and adevice configured to direct the radiation beam to the first branch orthe second branch, such that the radiation beam is configured by thefirst illumination unit during exposure of the first exposure field withthe pattern of the first patterning device and that the radiation beamis configured by the second illumination unit during exposure of thesecond exposure field with the pattern of the second patterning device.13. The lithographic apparatus of claim 10, wherein the non-zero numberof exposure field pitches is selected such that an illumination settingof the lithographic apparatus is changed between successive exposures ofthe first field and the second field.
 14. The lithographic apparatus ofclaim 10, wherein a distance between the pattern of the first patterningdevice and the pattern of the second patterning device substantiallyequals a reduction factor of the projection system multiplied by thenon-zero number of exposure field pitches.
 15. The lithographicapparatus of claim 10, wherein the non-zero number of unexposed exposurefield pitches is one.
 16. A method of exposing a substrate using alithographic apparatus including a projection system, the methodcomprising: arranging on a stage apparatus a first and a secondpatterning device that each comprise a pattern such that the pattern ofthe first patterning device and the pattern of the second patterningdevice are adjacent to each other in a scanning direction; acceleratingthe first patterning device to a first predetermined speed relative tothe projection system; accelerating the substrate to a predeterminedscanning speed relative to the projection system; projecting the patternof the first patterning device onto a first field of the substrate whilesubstantially maintaining said scanning speed; displacing the substratesubstantially at the predetermined scanning speed so as to skip anexposure of a non-zero number of unexposed exposure field pitches on thesubstrate arranged adjacent to the first field in the scanningdirection; accelerating the second patterning device to the firstpredetermined speed relative to the projection system so as to exposethe second pattern onto a second field of the substrate arrangedadjacent to the non-zero number of unexposed exposure field pitches onthe substrate in the scanning direction; and projecting the pattern ofthe second patterning device onto the second field of the substrate. 17.The method of claim 16, wherein the arranging includes arranging thefirst and a second patterning device such that the pattern of the firstpatterning device and the pattern of the second patterning device areadjacent to each other in a scanning direction with a distance betweenthe pattern of the first patterning device and the pattern of the secondpatterning device substantially equals to a predetermined function of areduction factor of the projection system and the non-zero number ofexposure field pitches of a field pattern of the substrate; whereinaccelerating the first and second patterning devices to the firstpredetermined speed relative to the projection system and acceleratingthe substrate to the predetermined scanning speed relative to theprojection system include accelerating the first and second patterningdevices and the substrate to a predetermined speed relative to theprojection system; wherein the projecting includes projecting thepattern of the first patterning device onto the first field of thesubstrate while substantially maintaining said predetermined speed;wherein the displacing includes displacing the first and secondpatterning devices and the substrate substantially at the predeterminedspeed so as to skip the non-zero number of exposure field pitches on thesubstrate arranged adjacent to the first field in the scanningdirection; and wherein the projecting includes projecting the pattern ofthe second patterning device onto the second field of the substratearranged adjacent to the non-zero number of exposure field pitches onthe substrate in the scanning direction.
 18. The method of claim 17,wherein the distance between the pattern of the first patterning deviceand the pattern of the second patterning device substantially equals thereduction factor of the projection system multiplied by the non-zeronumber of exposure field pitches.
 19. The method of claim 16, whereinthe pattern of the first patterning device and the pattern of the secondpatterning device are substantially identical.
 20. The method of claim16, wherein the pattern of the first patterning device comprises a phaseshift mask and wherein the pattern of the second patterning devicecomprises a trim mask or a binary mask.
 21. The method of claim 16,further comprising: obscuring a first part of the first patterningdevice before the pattern of the first patterning device is imparted bya radiation beam; obscuring a second part of the first patterning deviceafter the pattern of the first patterning device is imparted by theradiation beam; obscuring a first part of the second patterning devicebefore the pattern of the second patterning device is imparted by theradiation beam, and obscuring a second part of the second patterningdevice after the pattern of the second patterning device is imparted bythe radiation beam.
 22. The method of claim 16, wherein the non-zeronumber of exposure field pitches is selected such that an illuminationsetting of the lithographic apparatus is changed between successiveexposures of the first field and the second field.
 23. The method ofclaim 16, wherein the non-zero number of unexposed exposure fieldpitches is one.
 24. A stage apparatus for a lithographic apparatus thatincludes a projection system configured to project a pattern onto asubstrate, the stage apparatus comprising an object table configured tohold a first patterning device and a second patterning device, whereinthe stage apparatus is constructed and arranged to: a) perform ascanning operation of the first and the second patterning device withrespect to the projection system, such that during the scanningoperation a pattern of the first patterning device and a pattern of thesecond patterning device are projected on the substrate, and b) positionthe first and second patterning devices during the scanning operationsuch that a distance between the pattern of the first patterning deviceand the pattern of the second patterning device substantially equals apredetermined function of a reduction factor of the projection systemand a non-zero number of exposure field pitches of a field pattern ofthe substrate so as to expose a first exposure field with the firstpatterning device and a second exposure field with the second patterningdevice, the second exposure field being substantially spaced apart fromthe first exposure field by the non-zero number of exposure fieldpitches.
 25. The method of claim 24, wherein the non-zero number ofunexposed exposure field pitches is one.
 26. A stage apparatus for alithographic apparatus that includes a projection system configured toproject a pattern on a substrate, the stage apparatus comprising: afirst object table configured to hold a first patterning device; asecond object table configured to hold a second patterning device, eachof the first and second patterning devices including a pattern, and thefirst and second patterning devices being arranged such that the patternof the first patterning device and the pattern of the second patterningdevice are adjacent to each other in a scanning direction; a positioningdevice configured to position the first and second patterning devicesand the substrate, and a control device configured to control thepositioning device, the control device constructed and arranged toprovide the positioning device with a set-point adapted to: (i)accelerate the first patterning device to a first predetermined speedrelative to the projection system of the lithographic apparatus, (ii)accelerate the substrate to a predetermined scanning speed relative tothe projection system so as to project the pattern of the firstpatterning device onto a first field of the substrate whilesubstantially maintaining said scanning speed; (iii) displace thesubstrate substantially at the predetermined scanning speed so as toskip an exposure of at least one unexposed exposure field on thesubstrate, the at least one unexposed exposure field arranged adjacentto the first field in the scanning direction; and (iv) accelerate thesecond patterning device to the first predetermined speed relative tothe projection system so as to expose the second pattern onto a secondfield of the substrate arranged adjacent to the at least one unexposedexposure field pitch on the substrate in the scanning direction.